MKS Astron 2L (also known as the AX7651 or AX7657) is a Remote Plasma Source (RPS) primarily used in semiconductor manufacturing to clean cap C cap V cap D (Chemical Vapour Deposition) and cap F cap P cap D
Never exhaust ozone directly into the workspace; use an ozone destruct unit. mks astron 2l manual
The manual contains essential warnings for handling these high-power reactive gas systems: MKS Astron 2L (also known as the AX7651
Connect the primary AC power source (refer to your specific model label for voltage requirements). mks astron 2l manual